PSIA XE-100 Scanning Probe Microscope “ours is not just an AFM”  

The new XE series SPM was developed to have the following advantages: 1) Scan accuracy: There is no cross talk between the x-y and z axes, and one can achieve high scan accuracy. 2) Sample size: Since the sample is scanned by a flexure scanner only in the x-y direction, large samples as well as small samples can be scanned at sufficiently high speed. 3) Scan speed: Since the z scanner has a high resonance frequency with high force, the z servo frequency response is much greater than in conventional AFM. 4) Convenience: Since the laser beam aligning mechanism is fixed to the head, it is possible to produce alignment fixtures of adequate size for convenient and precise adjustment without requiring any tools. 5) Optical vision: Since there is enough clearance above the cantilever, it is possible to accommodate a direct on-axis optical microscope.

Systems Specifications
1.   Mechanical
     Sample size   up to 100x100 mm, 20 mm thick   
     Sample mass  up to 500 g  
     Sample stage travel 25x25 mm with manual micrometer  
     X-Y scanner    Single module parallel-kinematics flexure stage 
     Scan size: 50x50 μm (5x5 μm in LV Mode)  
     Resolution: < 0.15 nm (< 0.02 nm in LV Mode)   
     Z-scanner    Guided flexure stage  
     Scan size: 12 μm (1.7 μm in LV mode)  
     Resolution: 0.05 nm (0.01nm in LV mode)   
     Z-stage    Travel: 30mm  
     Resolution: 0.08 μm  
     Max speed: 30,000 steps/sec  
     Optical microscope  Magnification : 500x on 10.4 inch
     LCD monitor  Resolution: 1 μm (0.28N.A.)

2.  Electrical
     DSP: TMS320C6701 at 167MHz   
     14 channels (4x16-bit, 10x12 bit) at 500kHz settling  
     28 channels (5x16-bit with MUX) at 500kHz sampling