ZYGO NewView 5032 -Optical Profiler  “Advanced Surface Metrology”

The NewView 5000 is a "next generation" metrology system based upon proven, award-winning, and patented, technologies developed by ZYGO, by delivering precise, fast, accurate, 3-D area surface measurements with superior vertical resolution. It is an indispensable non-contact tool for determining the static surface and height profile in micromachined devices non-destructively. 

Description

The NewView 5032 is based on scanning white-light interferometry, in which a pattern of bright and dark lines (fringes) result from an optical path difference between a reference and a sample beam. Incoming light is split inside an interferometer, one beam going to an internal reference surface and the other to your sample. After reflection, the beams recombine inside the interferometer, undergoing constructive and destructive interference and producing the light and dark fringe pattern. In the NewView 5032, a precision vertical scanning transducer and camera together generate a three-dimensional interferogram of the surface, processed by the computer and transformed by frequency domain analysis resulting in a quantitative 3-D image.